Jeng C C, Wu C H, Li C Z, Chen J H
Institute of nanoscience, National Chung Hsing University, 407 Taichung, Taiwan.
Opt Express. 2009 Aug 17;17(17):14722-8. doi: 10.1364/oe.17.014722.
An accurate and simple optical triangulation method is proposed for determining the distance and the tilt angle between the window and the SQUID sensor in a scanning SQUID microscope (SSM) system. The surface of window near the sensor plane is roughened with Alumina powder so that the incident and reflected traces of the laser beam passing the window surface become visible and can be measured precisely with a normal optical microscope. Using the proposed approach, the distance between the sensor and the sample can be reproducibly adjusted to 30 microm or less. This method can also be applied to photolithography apparatus to detect the relative positions of the mask and the wafer.
提出了一种精确且简单的光学三角测量方法，用于确定扫描超导量子干涉仪显微镜（SSM）系统中窗口与超导量子干涉仪（SQUID）传感器之间的距离和倾斜角度。靠近传感器平面的窗口表面用氧化铝粉末进行粗糙化处理，使得穿过窗口表面的激光束的入射和反射轨迹变得可见，并且可以用普通光学显微镜精确测量。使用所提出的方法，传感器与样品之间的距离可以重复调节到30微米或更小。该方法还可应用于光刻设备，以检测掩模和晶圆的相对位置。
