Reflection aspherical microlenses for planar optics fabricated by electron-beam lithography.

Reflection aspherical microlenses are proposed for planar optics. These microlenses have the structure of a nonconcentric elliptical concave mirror. Broadband light can be used for these microlenses because these microlenses have no chromatic aberration. The microlens fabricated by electron-beam lithography and Ag deposition was found to have a smooth surface as designed. The focal length of the microlens was constant independent of the wavelength. The measured spot sizes agreed with diffraction-limited values at two different wavelengths. By using the array of this microlens, multiple images with excellent contrast were obtained under incoherent white-light illumination.