Wang Ping, Yu Xiaochang, Zhu Yechuan, Yu Yiting, Yuan Weizheng
Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi'an, 710072, China.
Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems, Northwestern Polytechnical University, Xi'an, 710072, China.
Nanoscale Res Lett. 2017 Dec;12(1):388. doi: 10.1186/s11671-017-2158-x. Epub 2017 Jun 2.
A novel low-cost, batch-fabrication method combining the spin-coating nanosphere lithography (NSL) with the conventional photolithographic technique is demonstrated to efficiently produce the metallic planar microlenses and their arrays. The developed microlenses are composed of subwavelength nanoholes and can focus light effectively in the entire visible spectrum, with the foci sizes close to the Rayleigh diffraction limit. By changing the spacing and diameter of nanoholes, the focusing efficiency can be tuned. Although the random defects commonly exist during the self-assembly of nanospheres, the main focusing performance, e.g., focal length, depth of focus (DOF), and full-width at half-maximum (FWHM), keeps almost invariable. This research provides a cheap way to realize the integrated nanophotonic devices on the wafer level.
一种将旋涂纳米球光刻技术（NSL）与传统光刻技术相结合的新型低成本批量制造方法被证明能够高效地生产金属平面微透镜及其阵列。所开发的微透镜由亚波长纳米孔组成，能够在整个可见光谱范围内有效地聚焦光线，焦点尺寸接近瑞利衍射极限。通过改变纳米孔的间距和直径，可以调整聚焦效率。尽管在纳米球的自组装过程中通常会存在随机缺陷，但主要的聚焦性能，如焦距、焦深（DOF）和半高宽（FWHM）几乎保持不变。这项研究提供了一种在晶圆级实现集成纳米光子器件的廉价方法。
