Solgaard O, Sandejas F S, Bloom D M
Opt Lett. 1992 May 1;17(9):688-90. doi: 10.1364/ol.17.000688.
A new type of light modulator, the deformable grating modulator, based on electrically controlling the amplitude of a micromachined phase grating is described. Mechanical motion of one quarter of a wavelength is sufficient for switching in this device. The small mechanical motion allows the use of structures with high mechanical resonance frequencies. We have developed a deformable grating modulator with a bandwidth of 1.8 MHz and a switching voltage of 3.2 V and have demonstrated modulation with 16 dB of contrast. Smaller devices with bandwidths of as much as 6.1 MHz and predicted switching voltages of less than 10 V were also fabricated.
本文描述了一种新型光调制器——可变形光栅调制器，它基于对微机械加工的相位光栅的幅度进行电控制。在该器件中，四分之一波长的机械运动就足以实现切换。这种小幅度的机械运动使得能够使用具有高机械共振频率的结构。我们已经研制出一种带宽为1.8兆赫兹、开关电压为3.2伏的可变形光栅调制器，并展示了对比度为16分贝的调制效果。还制造出了带宽高达6.1兆赫兹、预计开关电压低于10伏的更小尺寸的器件。
