Aberration-free lithography setup for fabrication of holographic diffractive optical elements.

A holographic optical lithography setup with extremely small longitudinal spherical aberration is described. The setup is used for the fabrication of holographic diffractive optical elements intended to collect light emitted from a fluorescence spot located on a biochip surface. A key feature of the optical setup is its ability to simulate a point-source-like fluorescence spot. A detailed description of the setup together with its optical properties are provided. The fluorescence light collection efficiency of the holographic diffractive optical elements produced using this setup is demonstrated.