Materials Science Center, College of Engineering, University of Wisconsin, Madison, WI 53706, USA.
Microsc Microanal. 2009 Dec;15(6):484-90. doi: 10.1017/S1431927609990390. Epub 2009 Oct 6.
The rapid advance and falling costs of computing power and data storage during the last 40 years have greatly enhanced the data reduction speed and analytical capacity of energy dispersive spectroscopy (EDS) systems. At the same time, the solid state X-ray detector [until recently, the Si(Li) diode] has seen performance increases due to the use of advanced materials and processing techniques. In addition, the performance of the electronic components (field effect transistor, preamp, and pulse processor) of an EDS system has been constantly improved. These technology advances have resulted in improved spectral quality, excellent light element detection, and increased count rate performance. The results have been truly remarkable and driven by the needs of the analyst. This article will summarize the progress made in these areas in the last 40 years and make a brief reference to prospects for future development in EDS system performance.
在过去的 40 年中，计算能力和数据存储成本的迅速提高极大地提高了能量色散光谱（EDS）系统的数据缩减速度和分析能力。同时，由于采用了先进的材料和加工技术，固态 X 射线探测器[直到最近，还是硅锂二极管]的性能有所提高。此外，EDS 系统的电子元件（场效应晶体管、前置放大器和脉冲处理器）的性能也在不断提高。这些技术进步带来了光谱质量的改善、出色的轻元素检测和更高的计数率性能。这些成果令人瞩目，是分析人员需求推动的结果。本文将总结过去 40 年来在这些领域取得的进展，并简要展望 EDS 系统性能的未来发展前景。
