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Microsc Microanal. 2009 Dec;15(6):491-504. doi: 10.1017/S1431927609991085.
The computerized multichannel analyzer running software specifically designed for X-ray analysis appeared very early in the commercialization of the energy dispersive X-ray spectrometer (EDS) and, like the solid-state X-ray detector itself, was built on a technology foundation originally developed for nuclear spectroscopy. However, software techniques employed for gamma-ray spectra could not accommodate the continuum component of EDS spectra, and a new approach was required. Least-squares fitting with "top-hat" filtered spectra proved to be an effective solution that is still widely used today. Though modern computer technology has subsequently contributed greatly to the speed and convenience of present-day EDS software, it seems that the achievable accuracy and precision of spectrum analysis has not fundamentally improved, and most of the early challenges are still quite relevant, although they may appear in new guises. The availability of the high speed silicon drift detector, however, may provide both the incentive and the data precision to drive future advances. This article traces the formative years of EDS software from the personalized perspective of a participant. Factors that shaped the development of the industry are identified, and future directions are speculated.
计算机多道分析器运行的软件专门为 X 射线分析而设计，在能量色散 X 射线光谱仪 (EDS) 的商业化中很早就出现了，并且像固态 X 射线探测器本身一样，它建立在最初为核光谱学开发的技术基础上。然而，用于伽马射线光谱的软件技术无法适应 EDS 光谱的连续谱成分，因此需要一种新的方法。最小二乘法拟合带有“顶帽”滤波的光谱被证明是一种有效的解决方案，至今仍被广泛使用。尽管现代计算机技术随后极大地提高了当今 EDS 软件的速度和便利性，但似乎光谱分析的可实现精度并没有从根本上提高，并且大多数早期的挑战仍然非常相关，尽管它们可能以新的形式出现。然而，高速硅漂移探测器的出现，可能为未来的发展提供动力，并提供数据精度。本文从参与者的个性化视角追溯了 EDS 软件的形成年代。确定了影响行业发展的因素，并对未来的发展方向进行了推测。
