Polymer Research Institute, Department of Chemical Engineering, Pohang University of Science and Technology, Pohang 790-784, Korea.
Nanotechnology. 2009 Nov 18;20(46):465201. doi: 10.1088/0957-4484/20/46/465201. Epub 2009 Oct 22.
We report the development of solution-processed zinc oxide (ZnO) transparent thin-film transistors (TFTs) with a poly(2-hydroxyethyl methacrylate) (PHEMA) gate dielectric on a plastic substrate. The ZnO nanorod film active layer, prepared by microwave heating, showed a highly uniform and densely packed array of large crystal size (58 nm) in the [002] direction of ZnO nanorods on the plasma-treated PHEMA. The flexible ZnO TFTs with the plasma-treated PHEMA gate dielectric exhibited an electron mobility of 1.1 cm(2) V(-1) s(-1), which was higher by a factor of approximately 8.5 than that of ZnO TFTs based on the bare PHEMA gate dielectric.
我们报告了在塑料衬底上用聚(2-羟乙基甲基丙烯酸酯)(PHEMA)作为栅介质制备溶液处理的氧化锌(ZnO)透明薄膜晶体管(TFT)的方法。通过微波加热制备的 ZnO 纳米棒薄膜活性层在经过等离子体处理的 PHEMA 上表现出高度均匀和密集排列的 ZnO 纳米棒的[002]方向上的大晶体尺寸(58nm)。具有等离子体处理的 PHEMA 栅介质的柔性 ZnO TFT 具有 1.1cm2V-1s-1的电子迁移率,比基于裸 PHEMA 栅介质的 ZnO TFT 高约 8.5 倍。