Hu Gangshi, Huang Jianqiao, Orkoulas Gerassimos, Christofides Panagiotis D
Department of Chemical and Biomolecular Engineering, University of California, Los Angeles, California 90095, USA.
Phys Rev E Stat Nonlin Soft Matter Phys. 2009 Oct;80(4 Pt 1):041122. doi: 10.1103/PhysRevE.80.041122. Epub 2009 Oct 21.
The dependence of film surface roughness and porosity on lattice size in a porous thin film deposition process is studied via kinetic Monte Carlo simulations on a triangular lattice. For sufficiently large lattice size the steady-state value of the expected film porosity has a weak dependence on the lattice size and the steady-state value of the expected surface roughness square varies linearly with lattice size. An analysis of the film morphology based on a stochastic partial differential equation description of the film surface morphology supports and explains the findings of the numerical simulations.
