Yu Xiang, Hua Meng, Wang Chengbiao
Department of Manufacturing Engineering and Engineering Management, City University of Hong Kong, Hong Kong, PR China.
J Nanosci Nanotechnol. 2009 Nov;9(11):6366-71. doi: 10.1166/jnn.2009.1304.
Diamonds like carbon (Ag-DLC) films of nine Ag contents were deposited on (100) Si substrate in a mid-frequency dual-magnetron system. The influence of Ag content and nanograin size on the microstructure, mechanical properties and sliding tribological behaviors of the films has been investigated. It is found that (i) the Ag nanocrystallites were dispersed in the amorphous DLC matrix, and increasing Ag content resulted in an upward tendency of the Ag nanocrystallite size; (ii) the films with Ag content ranging between 3.3-11.4 at% and with Ag nanograin sizes in range of 5.4-16.8 nm exhibited higher hardness, lower intrinsic stress, better adhesion, and lower friction coefficient and wear rate as compared with those of 14.7-23.6 at% Ag content and 19.7-34.7 nm nanograin sizes; and (iii) the best combined properties were achieved for the film deposited with 8.7 at% Ag and with grain size 12.9 nm.
在中频双磁控系统中，将九种不同银含量的类金刚石碳（Ag-DLC）薄膜沉积在（100）硅衬底上。研究了银含量和纳米晶粒尺寸对薄膜微观结构、力学性能及滑动摩擦学行为的影响。结果发现：（i）银纳米微晶分散在非晶DLC基体中，银含量增加导致银纳米微晶尺寸呈上升趋势；（ii）与银含量为14.7-23.6 at%且纳米晶粒尺寸为19.7-34.7 nm的薄膜相比，银含量在3.3-11.4 at%之间且银纳米晶粒尺寸在5.4-16.8 nm范围内的薄膜具有更高的硬度、更低的内应力、更好的附着力以及更低的摩擦系数和磨损率；（iii）对于沉积的银含量为8.7 at%且晶粒尺寸为12.9 nm的薄膜，其综合性能最佳。
