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电弧离子镀NbN基纳米复合薄膜的微观结构、力学性能及摩擦学性能

Microstructure, Mechanical and Tribological Properties of Arc Ion Plating NbN-Based Nanocomposite Films.

作者信息

Fu Yingying, Li Hongxuan, Chen Jianmin, Guo Hongjian, Wang Xiang

机构信息

Bailie School of Petroleum Engineering, Lanzhou City University, Lanzhou 730070, China.

State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China.

出版信息

Nanomaterials (Basel). 2022 Nov 5;12(21):3909. doi: 10.3390/nano12213909.

Abstract

NbN, NbN-Ag and NbN/NbN-Ag multilayer nanocomposite films were successfully deposited by an arc ion plating system (AIP), and their microstructures, mechanical and tribological properties were systematically investigated. The results show that all the films had a polycrystalline structure, and the Ag in the Ag-doped films existed independently as a face-centered cubic phase. The content of Ag in NbN-Ag and NbN/NbN-Ag films was 20.11 and 9.07 at.%, respectively. NbN films fabricated by AIP technique had excellent mechanical properties, and their hardness and critical load were up to 44 GPa and 34.6 N, respectively. The introduction of Ag into NbN films obviously reduced the friction coefficient at room temperature, while the mechanical properties and wear resistance were degraded sharply in comparison with that of NbN films. However, the NbN/NbN-Ag films presented better hardness, , /, adhesive strength and wear resistance than NbN-Ag films. Additionally, analysis of wear surfaces of the studied films and AlO balls using 3D images, depth profiles, energy dispersive spectrometry (EDS) and Raman spectra indicated that the main wear mechanisms of NbN and NbN/NbN-Ag films were adhesive and oxidation wear with slight abrasive wear, while the severe abrasive and oxidation wear were the dominant wear mechanism for NbN-Ag films.

摘要

通过电弧离子镀系统(AIP)成功制备了氮化铌(NbN)、氮化铌-银(NbN-Ag)和氮化铌/氮化铌-银多层纳米复合薄膜,并对其微观结构、力学性能和摩擦学性能进行了系统研究。结果表明,所有薄膜均具有多晶结构,掺杂银的薄膜中的银以面心立方相独立存在。NbN-Ag和NbN/NbN-Ag薄膜中银的含量分别为20.11at.%和9.07at.%。采用AIP技术制备的NbN薄膜具有优异的力学性能,其硬度和临界载荷分别高达44GPa和34.6N。在NbN薄膜中引入银明显降低了室温下的摩擦系数,但其力学性能和耐磨性与NbN薄膜相比急剧下降。然而,NbN/NbN-Ag薄膜比NbN-Ag薄膜具有更好的硬度、、/、结合强度和耐磨性。此外,使用三维图像、深度剖面、能量色散光谱(EDS)和拉曼光谱对研究薄膜和AlO球的磨损表面进行分析表明,NbN和NbN/NbN-Ag薄膜的主要磨损机制是粘着磨损和氧化磨损,并伴有轻微的磨粒磨损,而严重的磨粒磨损和氧化磨损是NbN-Ag薄膜的主要磨损机制。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0518/9655467/965cc0549e3b/nanomaterials-12-03909-g001.jpg

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