Li Yibin, Zhang Sam, Liu Y, Chen T P, Sritharan Thirumany, Xu Cong
School of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore.
J Nanosci Nanotechnol. 2009 Jul;9(7):4116-20. doi: 10.1166/jnn.2009.m19.
In this paper, we developed nc-Al/a-Al2O3 nanocomposite thin films using magnetron sputtering. The nc-Al/a-Al2O3 films were sputtered on p-type Si substrates from pure Al target in gas mixture of Ar and O2. X-ray photoelectron spectroscopy and high resolution transmission electron microscope studies confirm that the nanocrystalline Al are embedded in amorphous Al2O3 matrix thus nc-Al/ a-Al2O3 nanocomposite forms. This nanocomposite thin film exhibits memory effect as a result of charge trapping.
在本文中，我们利用磁控溅射法制备了nc-Al/a-Al₂O₃纳米复合薄膜。在氩气和氧气的混合气体中，从纯铝靶材在p型硅衬底上溅射制备了nc-Al/a-Al₂O₃薄膜。X射线光电子能谱和高分辨率透射电子显微镜研究证实，纳米晶铝嵌入非晶Al₂O₃基体中，从而形成了nc-Al/a-Al₂O₃纳米复合材料。由于电荷俘获，这种纳米复合薄膜表现出记忆效应。
