Department of Chemical and Biological Engineering, University of Wisconsin, Madison, WI 53706, USA.
ACS Nano. 2010 Feb 23;4(2):599-609. doi: 10.1021/nn901342j.
Soft lithographic techniques augment or enhance the capabilities of traditional patterning processes and expand the diversity of materials that can be patterned. Realization of robust parallel techniques for creating chemical patterns at the nanoscale has been challenging. Here we present a method for creating and replicating chemical patterns that uses functionalized homopolymer inks that are preferentially segregated into the nanodomains of phase-separated diblock copolymer films. The inks are transferred by reaction to substrates that are brought into contact with block copolymer films, creating chemical patterns on the substrate that mirror the domain structure present at the film surface with high fidelity and resolution. In addition to printing from self-assembled domain structures, we can also direct the assembly of the block copolymer films from which transfer occurs using lithographically defined masters so as to replicate and transfer patterns of inks with controlled and well-defined geometries. The transferred patterns may be at higher resolution than the lithographically defined master, and the process can be repeated to create multiple copies of identical replicas. Transfer of one ink from one block of the copolymer is also possible, and filling the interspatial regions of the pattern with a second ink provides a pathway toward creating patterns with diverse chemical functionalities.
软光刻技术增强或扩展了传统图案化工艺的功能，并扩展了可图案化材料的多样性。实现稳健的纳米级化学图案并行技术一直具有挑战性。在这里，我们提出了一种使用功能化均聚物油墨的方法，该油墨优先分离到相分离嵌段共聚物膜的纳米域中。通过与接触嵌段共聚物膜的基底进行反应来转移油墨，在基底上形成化学图案，该图案以高保真度和分辨率反映出存在于膜表面的畴结构。除了从自组装的畴结构打印之外，我们还可以使用光刻定义的母版来指导嵌段共聚物膜的组装，从而复制和转移具有受控和明确定义几何形状的油墨图案。转移的图案的分辨率可能高于光刻定义的母版，并且可以重复该过程以创建相同复制品的多个副本。还可以从共聚物的一个嵌段转移一种油墨，并且用第二种油墨填充图案的间隔区域为创建具有多种化学功能的图案提供了途径。
