MEMS Sensors and Actuators Laboratory (MSAL), University of Maryland, College Park, MD 20742, USA.
Nanotechnology. 2010 Feb 5;21(5):055304. doi: 10.1088/0957-4484/21/5/055304. Epub 2010 Jan 6.
This paper reports on novel methodologies for the patterning and templated synthesis of virus-structured nanomaterials in two- and three-dimensional microfabricated architectures using the Tobacco mosaic virus (TMV). The TMV is a high aspect ratio biological molecule which can be engineered to include amino acids with enhanced binding properties. These modifications facilitate self-assembly of the TMV onto various substrates and enable its use as a template for the synthesis of nanostructured materials. This work focuses on the combination of this bottom-up biologically inspired fabrication method with standard top-down micromachining processes that allow direct integration of the virus-structured materials into batch-fabricated devices. Photolithographic patterning of uncoated as well as nickel-coated TMV nanostructures has been achieved using a lift-off process in both solvent and mild basic solutions and their assembly onto three-dimensional polymer and silicon microstructures is demonstrated. In addition to these patterning techniques, in situ formation of metal oxide TMV coatings in patterned microfabricated environments is shown using atomic layer deposition directly on the nickel-coated viruses. The biofabrication 'process toolbox' presented in this work offers a simple and versatile alternative for the hierarchical patterning and incorporation of biotemplated nanomaterials into micro/nanofabrication schemes.
本文报道了新颖的方法,用于使用烟草花叶病毒(TMV)在二维和三维微加工结构中对具有图案的病毒结构纳米材料进行图案化和模板合成。TMV 是一种高纵横比的生物分子,可以对其进行工程设计,使其包含具有增强结合性能的氨基酸。这些修饰促进了 TMV 在各种基底上的自组装,并使其能够用作合成纳米结构材料的模板。这项工作专注于将这种自下而上的受生物启发的制造方法与标准的自上而下的微加工工艺相结合,从而可以将病毒结构材料直接集成到批量制造的设备中。已经使用剥离工艺在溶剂和温和碱性溶液中实现了未涂层和镍涂层 TMV 纳米结构的光刻图案化,并展示了它们在三维聚合物和硅微结构上的组装。除了这些图案化技术之外,还展示了使用原子层沉积在镍涂层病毒上直接在图案化微加工环境中形成金属氧化物 TMV 涂层。本文介绍的生物制造“工艺工具箱”为分层图案化和将生物模板纳米材料纳入微/纳制造方案提供了一种简单而通用的替代方法。