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用于光刻和光、空气可逆光开关的新型蒽材料。

Novel anthracene materials for applications in lithography and reversible photoswitching by light and air.

机构信息

Department of Chemistry, University of Potsdam, Karl-Liebknecht-Strasse 24-25, 14476 Potsdam/Golm, Germany.

出版信息

Langmuir. 2010 Mar 16;26(6):4421-8. doi: 10.1021/la904299n.

DOI:10.1021/la904299n
PMID:20052984
Abstract

Herein we demonstrate how the photoreaction between anthracenes and singlet oxygen ((1)O(2)) is employed for applications either as photoswitch or as photoresist. Thin films of the diaryl-alkyl anthracene 1 and the analogous oligomeric species 2 were irradiated under photomasks to generate pattern structures composed of 1/1-O(2) and 2/2-O(2). Kelvin probe force microscopy (KPFM) provided a powerful and nondestructive method to image the pattern information. The following studies based on AFM, KPFM and contact angle measurements unfold that the two species 1 and 2 underwent different progressions after the imaging step. Degrading is observed for the monomeric compound 1 and the pattern eventually becomes recognizable in topography. In the oxidized state (1-O(2)) the monomeric species remains physically stable. In consequence, the unreacted portion is removable and the remaining oxygenated form 1-O(2) is sufficiently stable to protect an underlying substrate (e.g., silver) from etching. Thus, the system 1/1-O(2) operates as photoresist. On the other hand, both states of the oligomer 2 remain stable. The film is stable up to temperatures >120 degrees C required to erase the pattern within acceptable time by cycloreversion. Anthracene 2 therefore acts as erasable and rewritable photochromic switch. The different behavior between 1 and 2 is explained by phase transitions which cause crystallization and finally ablation. Such transitions affect only the monomeric system 1/1-O(2) and not the oligomeric system 2/2-O(2). In conclusion, we designed two very similar materials based on diarylanthracenes, which can act either as a photoresist or as a rewritable photochromic switch.

摘要

在此,我们展示了蒽与单线态氧 ((1)O(2)) 之间的光反应如何应用于光开关或光阻材料。将二芳基-烷基蒽 1 的薄膜和类似的齐聚物 2 的薄膜用掩模照射,生成由 1/1-O(2) 和 2/2-O(2) 组成的图案结构。Kelvin 探针力显微镜 (KPFM) 提供了一种强大且无损的成像方法。基于 AFM、KPFM 和接触角测量的进一步研究表明,两种物质 1 和 2 在成像步骤后经历了不同的过程。单体化合物 1 发生降解,其图案最终在形貌上变得可识别。在氧化态(1-O(2))下,单体物质保持物理稳定。因此,未反应的部分是可去除的,而剩余的氧化形式 1-O(2) 足够稳定,可以保护底层基底(例如银)免受蚀刻。因此,系统 1/1-O(2) 用作光阻。另一方面,齐聚物 2 的两种状态都保持稳定。该薄膜在 >120°C 的温度下稳定,这是通过环反转在可接受的时间内擦除图案所需的温度。因此,蒽 2 作为可擦除和可重写的光致变色开关。1 和 2 之间的不同行为是由相转变引起的,相转变会导致结晶和最终烧蚀。这种转变仅影响单体系统 1/1-O(2),而不影响齐聚物系统 2/2-O(2)。总之,我们设计了两种非常相似的基于二芳基蒽的材料,它们可以作为光阻材料或可重写的光致变色开关。

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