Diffraction images of truncated, one-dimensional, periodic targets.

Formulas are developed that permit the calculation of the diffraction images of truncated, one-dimensional, periodic objects in the presence of incoherent illumination using transfer function theory. Special attention is paid to the important problem of determining the minimum number of cycles that such a target must possess in order for it to act effectively as an infinite periodic target. Illustrative calculations are carried out for aberration-free, defocused systems.