Motycka J
Appl Opt. 1969 Jul 1;8(7):1435-8. doi: 10.1364/AO.8.001435.
The proposed interferometric method allows measurement of rms roughness and autocorrelation function in smooth-finished surfaces. In a Jamin interferometer, pairs of coherent beams with variable magnitudes of small lateral shear are produced that are reflected from the test surface and intefere. The intensity of interference fringes is recorded in dependence on the shear of the beams. The differences between maximal and minimal intensities (or visibility) decrease in dependence on the shear, and the course of the decrease corresponds to that of the autocorrelation function. At a fairly great shear the visibility stabilizes at a certain value from which the surface roughness is derived. The theoretical basis of the method is presented, the accuracy is discussed, and the measuring device is proposed.
所提出的干涉测量方法可用于测量光滑表面的均方根粗糙度和自相关函数。在雅满干涉仪中，会产生具有可变小横向剪切量的相干光束对，这些光束从测试表面反射并发生干涉。干涉条纹的强度根据光束的剪切量进行记录。最大强度与最小强度之间的差值（或可见度）随剪切量的增加而减小，且减小过程与自相关函数的过程相对应。在相当大的剪切量下，可见度会稳定在某个值，由此可得出表面粗糙度。文中阐述了该方法的理论基础，讨论了其精度，并提出了测量装置。
