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使用具有可变剪切量的横向剪切干涉仪评估大像差。

Evaluation of large aberrations using a lateral-shear interferometer having variable shear.

作者信息

Rimmer M P, Wyant J C

出版信息

Appl Opt. 1975 Jan 1;14(1):142-50. doi: 10.1364/AO.14.000142.

DOI:10.1364/AO.14.000142
PMID:20134844
Abstract

A variable shear lateral shearing interferometer consisting of two holographically produced crossed diffraction gratings is used to test nonrotationally symmetric wavefronts having aberrations greater than 100 wavelengths and slope variations of more than 400 wavelengths/diameter. Comparisons are made with results of Twyman-Green interferometric tests for wavefront aberrations of up to thirty wavelengths. The results indicate that small wavefront aberrations can be measured as accurately with the lateral-shear interferometer as with the Twyman-Green interferometer and that aberrations that cannot be measured at all with a Twyman-Green interferometer can be measured to about 1% accuracy or better.

摘要

一种由两个全息制作的交叉衍射光栅组成的可变剪切横向剪切干涉仪,用于测试像差大于100个波长且斜率变化超过400个波长/直径的非旋转对称波前。将其结果与泰曼-格林干涉仪对高达30个波长的波前像差测试结果进行比较。结果表明,对于小的波前像差,横向剪切干涉仪与泰曼-格林干涉仪测量精度相当,并且泰曼-格林干涉仪根本无法测量的像差,横向剪切干涉仪可以测量到约1%或更高的精度。

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