Micro- and Nano-scale Engineering, Department of Mechanical Engineering, Eindhoven University of Technology, Den Dolech 2, 5600 MB Eindhoven, The Netherlands.
Nanotechnology. 2010 Feb 19;21(7):75602. doi: 10.1088/0957-4484/21/7/075602. Epub 2010 Jan 18.
Laser assisted catalytic chemical vapor deposition has recently emerged as an attractive method for locally growing carbon nanotubes (CNTs) in a cold wall reactor. So far, reported laser assisted CNT growth has been carried out without in situ process monitoring. This has made it difficult to control the growth process and limits the applicability of the method. Using a set of photodetectors with different spectral responses, we show that one can identify characteristic regimes of laser assisted CNT growth. More specifically, key process steps like catalyst activation, growth of CNTs, and amorphous carbon deposition are identified. Furthermore, the method allows optimization of growth conditions with respect to the quality of the growth products.
激光辅助催化化学气相沉积最近已成为在冷壁反应器中局部生长碳纳米管 (CNT) 的一种有吸引力的方法。到目前为止，已报道的激光辅助 CNT 生长是在没有原位过程监测的情况下进行的。这使得难以控制生长过程，并限制了该方法的适用性。我们使用一组具有不同光谱响应的光电探测器，表明可以识别激光辅助 CNT 生长的特征状态。更具体地说，识别了关键的工艺步骤，如催化剂活化、CNT 生长和非晶碳沉积。此外，该方法允许针对生长产物的质量优化生长条件。
