Beesley M J, Castledine J G
Appl Opt. 1970 Dec 1;9(12):2720-4. doi: 10.1364/AO.9.002720.
A technique is described for recording holograms and forming diffraction gratings in Shipley AZ1350 photoresist using the 4579-A output from an argon laser. A pre-exposure technique is described that not only reduces exposure times but increases the signal-to-noise ratio of the image. It is also shown that the effects of the variable characteristic of the resist can be alleviated by monitoring diffraction efficiency during development.
描述了一种使用氩激光4579-A输出在Shipley AZ1350光刻胶中记录全息图和形成衍射光栅的技术。描述了一种预曝光技术,该技术不仅缩短了曝光时间,还提高了图像的信噪比。还表明,通过在显影过程中监测衍射效率,可以减轻光刻胶可变特性的影响。