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使用光栅作为分束器的剪切干涉仪。

Shearing interferometer using the grating as the beam splitter.

作者信息

Yokozeki S, Suzuki T

出版信息

Appl Opt. 1971 Jul 1;10(7):1575-80. doi: 10.1364/AO.10.001575.

DOI:10.1364/AO.10.001575
PMID:20111164
Abstract

The theoretical interpretation of the shearing interferometer based on the moiré method using the fourier image of the grating is described. To obtain a pattern with good contrast, the observing plane must coincide with the normal fourier image plane of the grating or with the reversed fourier image plane. The information obtained by this method is the first partial derivative and under certain conditions the second partial derivative of the distortion from the reference wavefront, which is planar or spherical. Applications to measurement of the phase gradient and lens aberration are shown.

摘要

本文描述了基于莫尔法的剪切干涉仪的理论解释,该方法使用光栅的傅里叶图像。为了获得具有良好对比度的图案,观察平面必须与光栅的正常傅里叶图像平面或反向傅里叶图像平面重合。通过该方法获得的信息是相对于参考波前(平面或球面)畸变的一阶偏导数,在某些条件下是二阶偏导数。文中展示了该方法在相位梯度测量和透镜像差测量中的应用。

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