采用飞秒激光直接在熔融石英中制作均匀的微流控通道。

Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser.

机构信息

State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences, P.O. Box 800-211, Shanghai 201800, China.

出版信息

Opt Lett. 2010 Feb 1;35(3):282-4. doi: 10.1364/OL.35.000282.

DOI:10.1364/OL.35.000282

PMID:20125695

Abstract

We demonstrate direct fabrication of homogeneous microfluidic channels embedded in fused silica by femtosecond laser direct writing, followed by wet chemical etching and glass drawing. In addition, the glass drawing process significantly reduces the inner surface roughness of the fabricated channels, and centimeter-level microfluidic channels with an aspect ratio above 1000 can be realized.

摘要

我们通过飞秒激光直写技术，随后进行湿法化学刻蚀和玻璃拉锥，实现了均匀的微流道在熔融石英中的直接制造。此外，玻璃拉锥工艺显著降低了所制造通道的内表面粗糙度，从而可以实现具有 1000 以上纵横比的厘米级微流道。