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Instrument for measuring the roughness of supersmooth surfaces.

作者信息

Hildebrand B P, Gordon R L, Allen E V

出版信息

Appl Opt. 1974 Jan 1;13(1):177-80. doi: 10.1364/AO.13.000177.

Abstract

An instrument, based upon a measurement of the relative magnitudes of scattered light from a standard and the test mirror, was built and tested. Although the theory of the data reduction depends upon Gaussian statistics, we have obtained good results even with non-Gaussian surfaces. This paper describes the instrument, its theory, and experimental results.

摘要

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