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光栅评估仪:一种用于在真空紫外区域详细测量衍射光栅效率的装置。

Optical grating evaluator: a device for detailed measurement of diffraction grating efficiencies in the vacuum ultraviolet.

作者信息

Michels D J, Mikes T L, Hunter W R

出版信息

Appl Opt. 1974 May 1;13(5):1223-9. doi: 10.1364/AO.13.001223.

Abstract

A device for detailed measurement of diffraction grating efficiencies and over-all performance in the VUV has been designed and constructed at the Naval Research Laboratory. The system employs semiautomated mechanisms to scan the face of the grating with a narrow monochromatic beam, and an efficiency map of the grating surface is produced on a strip chart recorder. Grating efficiency in the various diffracted orders and intensity of light scattered between orders may also be measured. A unique feature is the ability to determine the angle and effectiveness of grating blaze and variations in blaze under different conditions of illumination.

摘要

海军研究实验室设计并制造了一种用于详细测量真空紫外(VUV)区域衍射光栅效率及整体性能的装置。该系统采用半自动机构,用窄单色光束扫描光栅表面,并在带状记录器上生成光栅表面的效率图。还可测量各衍射级次的光栅效率以及级次间散射光的强度。一个独特的功能是能够确定光栅闪耀的角度和效率,以及在不同照明条件下闪耀的变化情况。

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