Measuring concave diffraction grating efficiencies at grazing incidence.

The efficiency of a concave diffraction grating in a given order is obtained by measuring the intensities of the diffracted and incident beams and taking their ratio. A valid measurement requires that both the incident and diffracted beams be collected, in their entirety, by the detector. At grazing incidence, however, the diffracted beam may spread beyond the detector due to aberrations. In addition, the diffracted beams of consecutive orders may overlap so that unambiguous efficiency measurements cannot be made. The effect of aberrations on efficiency measurements has been studied, using ray tracing, for the geometry of the measuring instrument in use at the Naval Research Laboratory. This instrument, a reflectometer wherein the detector rotates around the grating at a given distance, is attached to a VUV monochromator which furnishes a diverging beam. The main effect of aberrations for this instrument is a spread of the diffracted beam in the direction of dispersion. The width of the diffracted beam is wavelength dependent and is minimal at the horizontal focus, spreading to longer and shorter wavelengths. Reducing the divergence of the incident beam reduces the spread but, for small radius gratings, not always sufficiently so that the entire diffracted beam can be collected by the detector. The distance from the detector to the grating can also be adjusted to aid in collecting all the diffracted beam. Some results of the ray tracing studies will be presented, and the effect of the f-number of the incident beam and the detector distance will be discussed.