Zhu Yahui, Tian Ailing, Wang Hongjun, Liu Bingcai
School of Computer Science and Technology, Huaiyin Normal University, Huaian 223300, China.
School of Opto-Electronics Engineering, Xi'an Technological University, Xi'an 710021, China.
Sensors (Basel). 2024 Dec 2;24(23):7714. doi: 10.3390/s24237714.
To overcome the limitations of phase sampling points in testing aspherical surface wavefronts using traditional interferometers, we propose a high-spatial-resolution method based on multi-directional orthogonal lateral shearing interferometry. In this study, we provide a detailed description of the methodology, which includes the theoretical foundations and experimental setup, along with the results from simulations and experiments. By establishing a relational model between the multi-directional differential wavefront and differential Zernike polynomials, we demonstrate high-spatial-resolution wavefront reconstruction using multi-directional orthogonal lateral shearing interferometry. Theoretical calculations and simulations of aspherical surface wavefront testing are followed by experimental verification on an aspherical surface with a known asphericity. Comparing the measurement results with those from the LuphoScan profilometer, we achieve a relative measurement error with an RMS precision better than λ/100.
为克服使用传统干涉仪测试非球面波前时相位采样点的局限性，我们提出了一种基于多方向正交横向剪切干涉术的高空间分辨率方法。在本研究中，我们详细描述了该方法，包括理论基础、实验装置以及模拟和实验结果。通过建立多方向差分波前与差分泽尼克多项式之间的关系模型，我们展示了使用多方向正交横向剪切干涉术进行高空间分辨率波前重建。在对非球面波前测试进行理论计算和模拟之后，我们在已知非球面度的非球面上进行了实验验证。将测量结果与LuphoScan轮廓仪的测量结果进行比较，我们实现了均方根精度优于λ/100的相对测量误差。
