Otten M T
Electron Optics Applications Laboratory, Eindhoven, The Netherlands.
J Electron Microsc Tech. 1991 Feb;17(2):221-30. doi: 10.1002/jemt.1060170209.
The technique of high-angle annular dark-field (HAADF) imaging, which is highly sensitive to atomic-number contrast, can be performed on TEM/STEM systems using the standard annular dark-field detector. For optimum HAADF imaging, the TEM/STEM must have a high maximum diffraction angle, small minimum camera length, and a descanning facility. The sensitivity of the technique is demonstrated to be about 10(5) to 10(6) times higher than energy-dispersive X-ray spectroscopy. Examples are shown from semiconductor, catalysis, ceramics, and particle analysis applications.
高角度环形暗场（HAADF）成像技术对原子序数对比度高度敏感，可使用标准环形暗场探测器在透射电子显微镜/扫描透射电子显微镜（TEM/STEM）系统上进行。为实现最佳的HAADF成像，TEM/STEM必须具有高最大衍射角、小最小相机长度和去扫描装置。该技术的灵敏度被证明比能量色散X射线光谱法高约10^5至10^6倍。文中展示了来自半导体、催化、陶瓷和颗粒分析应用的实例。
