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基于互补金属氧化物半导体电路的 DNA 修饰碳纳米管化学传感器。

DNA-decorated carbon-nanotube-based chemical sensors on complementary metal oxide semiconductor circuitry.

机构信息

Department of Electrical and Computer Engineering, NSF Nanoscale Science and Engineering Center for High-rate Nanomanufacturing, Northeastern University, Boston, MA 02115, USA.

出版信息

Nanotechnology. 2010 Mar 5;21(9):095504. doi: 10.1088/0957-4484/21/9/095504. Epub 2010 Feb 8.

DOI:10.1088/0957-4484/21/9/095504
PMID:20139486
Abstract

We present integration of single-stranded DNA (ss-DNA)-decorated single-walled carbon nanotubes (SWNTs) onto complementary metal oxide semiconductor (CMOS) circuitry as nanoscale chemical sensors. SWNTs were assembled onto CMOS circuitry via a low voltage dielectrophoretic (DEP) process. Besides, bare SWNTs are reported to be sensitive to various chemicals, and functionalization of SWNTs with biomolecular complexes further enhances the sensing specificity and sensitivity. After decorating ss-DNA on SWNTs, we have found that the sensing response of the gas sensor was enhanced (up to approximately 300% and approximately 250% for methanol vapor and isopropanol alcohol vapor, respectively) compared with bare SWNTs. The SWNTs coupled with ss-DNA and their integration on CMOS circuitry demonstrates a step towards realizing ultra-sensitive electronic nose applications.

摘要

我们提出了将单链 DNA(ss-DNA)修饰的单壁碳纳米管(SWNTs)集成到互补金属氧化物半导体(CMOS)电路上作为纳米级化学传感器。SWNTs 通过低压介电泳(DEP)工艺组装到 CMOS 电路上。此外,裸 SWNTs 被报道对各种化学物质敏感,并且 SWNTs 与生物分子复合物的功能化进一步增强了传感的特异性和灵敏度。在 SWNTs 上修饰 ss-DNA 后,我们发现气体传感器的传感响应增强了(对于甲醇蒸气和异丙醇蒸气,分别约为 300%和约 250%),与裸 SWNTs 相比。与 ss-DNA 耦合的 SWNTs 及其在 CMOS 电路上的集成展示了实现超灵敏电子鼻应用的一步。

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