• 文献检索
  • 文档翻译
  • 深度研究
  • 学术资讯
  • Suppr Zotero 插件Zotero 插件
  • 邀请有礼
  • 套餐&价格
  • 历史记录
应用&插件
Suppr Zotero 插件Zotero 插件浏览器插件Mac 客户端Windows 客户端微信小程序
定价
高级版会员购买积分包购买API积分包
服务
文献检索文档翻译深度研究API 文档MCP 服务
关于我们
关于 Suppr公司介绍联系我们用户协议隐私条款
关注我们

Suppr 超能文献

核心技术专利:CN118964589B侵权必究
粤ICP备2023148730 号-1Suppr @ 2026

文献检索

告别复杂PubMed语法,用中文像聊天一样搜索,搜遍4000万医学文献。AI智能推荐,让科研检索更轻松。

立即免费搜索

文件翻译

保留排版,准确专业,支持PDF/Word/PPT等文件格式,支持 12+语言互译。

免费翻译文档

深度研究

AI帮你快速写综述,25分钟生成高质量综述,智能提取关键信息,辅助科研写作。

立即免费体验

在立方 SiC/Si 晶圆上合成石墨烯。基于石墨烯的电子器件大规模生产的前景。

Graphene synthesis on cubic SiC/Si wafers. perspectives for mass production of graphene-based electronic devices.

机构信息

Leibniz Institute for Solid State and Materials Research, D-01069 Dresden, Germany.

出版信息

Nano Lett. 2010 Mar 10;10(3):992-5. doi: 10.1021/nl904115h.

DOI:10.1021/nl904115h
PMID:20141155
Abstract

The outstanding properties of graphene, a single graphite layer, render it a top candidate for substituting silicon in future electronic devices. The so far exploited synthesis approaches, however, require conditions typically achieved in specialized laboratories and result in graphene sheets whose electronic properties are often altered by interactions with substrate materials. The development of graphene-based technologies requires an economical fabrication method compatible with mass production. Here we demonstrate for the fist time the feasibility of graphene synthesis on commercially available cubic SiC/Si substrates of >300 mm in diameter, which result in graphene flakes electronically decoupled from the substrate. After optimization of the preparation procedure, the proposed synthesis method can represent a further big step toward graphene-based electronic technologies.

摘要

石墨烯是单层石墨,具有出色的性能,有望在未来的电子设备中取代硅。然而,迄今为止已开发的合成方法需要在专门实验室中才能达到的条件,并且得到的石墨烯片的电子性能往往会因与衬底材料的相互作用而发生改变。基于石墨烯的技术的发展需要一种与大规模生产兼容的经济制造方法。在这里,我们首次证明了在商业上可获得的直径大于 300 毫米的立方 SiC/Si 衬底上合成石墨烯的可行性,这导致石墨烯片与衬底电子分离。在优化制备程序后,所提出的合成方法可能是迈向基于石墨烯的电子技术的又一大步。

相似文献

1
Graphene synthesis on cubic SiC/Si wafers. perspectives for mass production of graphene-based electronic devices.在立方 SiC/Si 晶圆上合成石墨烯。基于石墨烯的电子器件大规模生产的前景。
Nano Lett. 2010 Mar 10;10(3):992-5. doi: 10.1021/nl904115h.
2
Conductance anisotropy in epitaxial graphene sheets generated by substrate interactions.衬底相互作用产生的外延石墨烯片中的电导各向异性。
Nano Lett. 2010 May 12;10(5):1559-62. doi: 10.1021/nl9035302.
3
Graphene epitaxy by chemical vapor deposition on SiC.碳化硅上化学气相沉积法外延石墨烯。
Nano Lett. 2011 Apr 13;11(4):1786-91. doi: 10.1021/nl200390e. Epub 2011 Mar 25.
4
Long spin relaxation times in wafer scale epitaxial graphene on SiC(0001).硅碳化硅(0001)衬底上外延石墨烯的长自旋弛豫时间。
Nano Lett. 2012 Mar 14;12(3):1498-502. doi: 10.1021/nl2042497. Epub 2012 Feb 17.
5
Epitaxial graphene nanoribbon array fabrication using BCP-assisted nanolithography.使用 BCP 辅助纳米光刻技术制备外延石墨烯纳米带阵列。
ACS Nano. 2012 Aug 28;6(8):6786-92. doi: 10.1021/nn301515a. Epub 2012 Jul 31.
6
Graphene synthesis: relationship to applications.石墨烯合成:与应用的关系。
Nanoscale. 2013 Jan 7;5(1):38-51. doi: 10.1039/c2nr32629a. Epub 2012 Nov 19.
7
Structure and magnetic properties of mono- and bi-layer graphene films on ultraprecision figured 4H-SiC(0001) surfaces.超精密加工的4H-SiC(0001)表面上单层和双层石墨烯薄膜的结构与磁性
J Nanosci Nanotechnol. 2011 Apr;11(4):2897-902. doi: 10.1166/jnn.2011.3893.
8
Large-scale synthesis and characterization of hexagonal prism-shaped SiC nanowires.六棱柱形碳化硅纳米线的大规模合成与表征
J Nanosci Nanotechnol. 2008 Apr;8(4):2151-6. doi: 10.1166/jnn.2008.070.
9
Delaminated graphene at silicon carbide facets: atomic scale imaging and spectroscopy.碳化硅晶面的分层石墨烯:原子尺度成像和光谱学。
ACS Nano. 2013 Apr 23;7(4):3045-52. doi: 10.1021/nn305922u. Epub 2013 Apr 4.
10
Atomic-scale morphology and electronic structure of manganese atomic layers underneath epitaxial graphene on SiC(0001).硅碳化硅(0001)衬底上外延石墨烯下锰原子层的原子尺度形貌和电子结构。
ACS Nano. 2012 Aug 28;6(8):6562-8. doi: 10.1021/nn302303n. Epub 2012 Aug 13.

引用本文的文献

1
Emerging Nanomaterials for Drinking Water Purification: A New Era of Water Treatment Technology.用于饮用水净化的新兴纳米材料:水处理技术的新时代。
Nanomaterials (Basel). 2024 Oct 25;14(21):1707. doi: 10.3390/nano14211707.
2
Advancements in nanomaterials for nanosensors: a comprehensive review.用于纳米传感器的纳米材料进展:全面综述
Nanoscale Adv. 2024 May 24;6(16):4015-4046. doi: 10.1039/d4na00214h. eCollection 2024 Aug 6.
3
High-Quality Epitaxial N Doped Graphene on SiC with Tunable Interfacial Interactions via Electron/Ion Bridges for Stable Lithium-Ion Storage.
通过电子/离子桥实现具有可调界面相互作用的高质量外延N掺杂碳化硅上的石墨烯用于稳定的锂离子存储。
Nanomicro Lett. 2023 Aug 18;15(1):202. doi: 10.1007/s40820-023-01175-6.
4
Influence of Al-O and Al-C Clusters on Defects in Graphene Nanosheets Derived from Coal-Tar Pitch via AlC Precursor.通过AlC前驱体形成的Al-O和Al-C团簇对煤焦油沥青衍生的石墨烯纳米片中缺陷的影响。
Materials (Basel). 2022 Oct 19;15(20):7312. doi: 10.3390/ma15207312.
5
Graphene-Based Nanocomposites: Synthesis, Mechanical Properties, and Characterizations.基于石墨烯的纳米复合材料:合成、力学性能及表征
Polymers (Basel). 2021 Aug 26;13(17):2869. doi: 10.3390/polym13172869.
6
Chemical Vapour Deposition of Graphene-Synthesis, Characterisation, and Applications: A Review.化学气相沉积法制备石墨烯:综述 **解析**:该文本属于学术论文的标题,翻译时要保留“Chemical Vapour Deposition”(CVD)和“Graphene”这两个关键词。
Molecules. 2020 Aug 25;25(17):3856. doi: 10.3390/molecules25173856.
7
Large positive in-plane magnetoresistance induced by localized states at nanodomain boundaries in graphene.在石墨烯纳米畴界的局域态诱导的大面内磁电阻。
Nat Commun. 2017 Feb 15;8:14453. doi: 10.1038/ncomms14453.
8
The role of graphene oxide and graphene oxide-based nanomaterials in the removal of pharmaceuticals from aqueous media: a review.氧化石墨烯及基于氧化石墨烯的纳米材料在从水介质中去除药物方面的作用:综述
Environ Sci Pollut Res Int. 2017 Mar;24(9):7938-7958. doi: 10.1007/s11356-017-8388-8. Epub 2017 Jan 22.
9
Ultrathin Single-Crystalline Boron Nanosheets for Enhanced Electro-Optical Performances.用于增强电光性能的超薄单晶硼纳米片
Adv Sci (Weinh). 2015 May 5;2(6):1500023. doi: 10.1002/advs.201500023. eCollection 2015 Jun.
10
High Electron Mobility in Epitaxial Trilayer Graphene on Off-axis SiC(0001).离轴SiC(0001)上外延三层石墨烯中的高电子迁移率。
Sci Rep. 2016 Jan 7;6:18791. doi: 10.1038/srep18791.