One-dimensional photon-counting detector array for use at EUV and soft x-ray wavelengths.

The performance of a one-dimensional photon-counting detector array based on microchannel array plates has been evaluated in the laboratory over the wavelength range from 461 A to 1216 A. The output charge pulses from a set of cascaded microchannel array plates were collected on a proximity-focused anode array consisting of sixty-four linear electrodes 1.3 mm in length and 25 microm in width, set on 50-microm centers. Although the dynamic range of the detector array was severely limited by ion-feedback effects in currently available microchannel array plates, the theoretical spatial resolution of 50 microm was achieved with a detection efficiency at wavelengths below 800 A equal to that of a conventional channel electron multiplier.