Technische Physik, Physikalisches Institut and Wilhelm Conrad Röntgen Research Center for Complex Material Systems, Am Hubland, D-97074 Würzburg, Germany.
Nanotechnology. 2010 Mar 12;21(10):105711. doi: 10.1088/0957-4484/21/10/105711. Epub 2010 Feb 16.
We have employed time-resolved photoluminescence (PL) spectroscopy to study the impact of HfO(2) surface capping by atomic layer deposition (ALD) on the optical properties of InP nanowires (NWs). The deposition of high-kappa dielectrics acting as a gate oxide is of particular interest in view of possible applications of semiconductor NWs in future wrap-gated field effect transistors (FETs). A high number of charged states at the NW-dielectrics interface can strongly degrade the performance of the FET which explains the strong interest in high quality deposition of high-kappa dielectrics. In the present work we show that time-resolved spectroscopy is a valuable and direct tool to monitor the surface quality of HfO(2)-capped InP NWs. In particular, we have studied the impact of ALD process parameters as well as surface treatment prior to the oxide capping on the NW-dielectrics interface quality. The best results in terms of the surface recombination velocity (S(0) = 9.5 x 10(3) cm s(-1)) were obtained for InP/GaP core/shell NWs in combination with a low temperature (100 degrees C) ALD process. While the present report focuses on the InP material system, our method of addressing the surface treatment for semiconductors with high-kappa dielectrics will also be applicable to nanoelectronic devices based on other III/V material systems such as InAs.
我们采用时间分辨光致发光(PL)光谱法研究了原子层沉积(ALD)在 InP 纳米线(NWs)上的 HfO2 表面覆盖对光学性质的影响。高介电常数的沉积作为栅介质在半导体 NWs 未来应用于栅环绕场效应晶体管(FET)方面具有特殊意义。在 NW-介电质界面处的大量带电状态会强烈降低 FET 的性能,这解释了对高质量高介电常数沉积的强烈兴趣。在本工作中,我们表明时间分辨光谱法是监测 HfO2 覆盖的 InP NWs 表面质量的一种有价值且直接的工具。特别是,我们研究了 ALD 工艺参数以及在氧化物覆盖之前的表面处理对 NW-介电质界面质量的影响。在 InP/GaP 核/壳 NWs 与低温(100°C)ALD 工艺相结合的情况下,获得了最佳的表面复合速率(S0 = 9.5 x 103 cm s-1)。虽然本报告重点介绍了 InP 材料系统,但我们处理具有高介电常数的半导体的表面处理方法也将适用于基于其他 III/V 材料系统(如 InAs)的纳米电子器件。