Department of Electrical and Computer Engineering, University of California, San Diego, 9500 Gilman Drive, La Jolla,California 92093, USA.
Opt Lett. 2010 Feb 15;35(4):598-600. doi: 10.1364/OL.35.000598.
We introduce an optical microresonator consisting of a planar waveguide terminated by metallic mirrors. The resonator was fabricated on a silicon-on-insulator platform, and its optical performance was theoretically and experimentally investigated. The demonstrated device had dimensions of 200 mumx40 mum and exhibited a quality factor of about 1000 and a free-spectral range of about 8 nm. Application to high-throughput, label-free biochemical sensing is considered, and optimization with respect to the surface sensitivity is carried out. The optimized sensitivity makes it possible to detect subnanometer layers of molecules adsorbing to the surface of the resonator.
我们介绍了一种由平面波导和金属镜组成的光学微谐振器。该谐振器是在绝缘体上硅平台上制作的，对其光学性能进行了理论和实验研究。所展示的器件尺寸为 200 µm×40 µm，具有约 1000 的品质因数和约 8 nm 的自由光谱范围。考虑将其应用于高通量、无标记生物化学传感，并针对表面灵敏度进行了优化。优化后的灵敏度使得能够检测吸附在谐振器表面的亚纳米分子层。
