Modeling and Characterization of Electrostatic Comb-drive Actuators in Conducting Liquid Media.

Operation of electrostatic actuators in liquid media has various proposed applications, especially in biological environments. The devices are operated by modulating at a frequency higher than the relaxation rate of the ions in solution. We present circuit models based on electric double layer theories to obtain analytical expression for the frequency-dependent force response of electrostatic actuators in ionic media. The model has been compared with experimental measurements of actuation in media of conductivity spanning five orders of magnitude. Further, impedance spectroscopy is used to measure the values of the circuit models, which are compared with the experiments. These measurements also quantify the parasitic impedances in the devices. A conformal layer of Parylene-C is demonstrated as a passivation scheme for the electrodes in corrosive media. The heating effects due to parasitic impedances are also quantified by temperature measurements of devices in fluids.