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光学薄膜新材料。

New materials for optical thin films.

作者信息

Stetter F, Esselborn R, Harder N, Friz M, Tolles P

出版信息

Appl Opt. 1976 Oct 1;15(10):2315-7. doi: 10.1364/AO.15.002315.

Abstract

New materials for optical thin films are presented. Zirconium oxide, titanium oxide, cerie oxide, and hafnium oxide in the form of black tablets or cones of various sizes for the electron beam evaporation technique were developed. These materials are oxygen depleted and give an uniform melt during the evaporation to give reproducible evaporation characteristics. A new mixture consisting of ZrO(2) and ZrTiO(4) for the production of high index layers is described. The evaporation conditions of the substance and the properties of thin layers of the mixture are given. The refractive index is 2.15 at 500 nm. The transmittance range is 0.4-7 microm. The layers are optically homogeneous. The application of layers of this mixture in a three-layer antireflection coating is described.

摘要

介绍了用于光学薄膜的新材料。开发了用于电子束蒸发技术的各种尺寸的黑色片状或锥形的氧化锆、氧化钛、氧化铈和氧化铪。这些材料贫氧,在蒸发过程中能均匀熔化,从而具有可重复的蒸发特性。描述了一种由ZrO(2)和ZrTiO(4)组成的用于生产高折射率层的新混合物。给出了该物质的蒸发条件以及该混合物薄膜的性能。在500nm处折射率为2.15。透射率范围为0.4 - 7微米。这些薄膜光学均匀。描述了这种混合物薄膜在三层抗反射涂层中的应用。

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