具有由金属硬模形成的嵌入式微镜的聚合物波导。

Polymeric waveguides with embedded micro-mirrors formed by Metallic Hard Mold.

作者信息

Dou Xinyuan, Wang Xiaolong, Huang Haiyu, Lin Xiaohui, Ding Duo, Pan David Z, Chen Ray T

机构信息

Department of Electrical and Computer Engineering, University of Texas at Austin, Austin, TX, 78758, USA.

出版信息

Opt Express. 2010 Jan 4;18(1):378-85. doi: 10.1364/OE.18.000378.

DOI:10.1364/OE.18.000378

PMID:20173857

Abstract

In this paper, we presented fabrication of nickel based metal mold with 45 degrees tilted surfaces on both ends of the channel waveguide through electroplating process. To obtain a precise 45 degrees tilted angle, a 50microm thick SU-8 layer was UV exposed under de-ionized water, with repeatable error control of 0.5 degrees . The polymeric waveguide array with 45 degrees micro-mirrors, which is formed by a UV imprinting method with the fabricated metallic mold, shows total insertion losses around 4dB, propagation loss around 0.18dB/cm and 75% coupling efficiency.

摘要

在本文中，我们展示了通过电镀工艺制造通道波导两端带有45度倾斜表面的镍基金属模具。为了获得精确的45度倾斜角，在去离子水下对50微米厚的SU-8层进行紫外线曝光，可重复误差控制在0.5度以内。利用制造的金属模具通过紫外线压印法形成的带有45度微镜的聚合物波导阵列，其总插入损耗约为4dB，传播损耗约为0.18dB/cm，耦合效率为75%。