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采用高对比度光栅的单片集成多波长垂直腔面发射激光器阵列

Monolithically integrated multi-wavelength VCSEL arrays using high-contrast gratings.

作者信息

Karagodsky Vadim, Pesala Bala, Chase Christopher, Hofmann Werner, Koyama Fumio, Chang-Hasnain Connie J

机构信息

Department of Electrical Engineering and Computer Science, University of California at Berkeley, Cory Hall, Berkeley, CA 94720, USA.

出版信息

Opt Express. 2010 Jan 18;18(2):694-9. doi: 10.1364/OE.18.000694.

Abstract

We propose a novel design for multi-wavelength arrays of vertical cavity surface-emitting lasers (VCSELs) using high-contrast gratings (HCGs) as top mirrors. A range of VCSEL cavity wavelengths in excess of 100 nm is predicted by modifying only the period and duty-cycle of the high-contrast gratings, while leaving the epitaxial layer thickness unchanged. VCSEL arrays fabricated with this novel design can easily accommodate the entire Er-doped fiber amplifier bandwidth with emission wavelengths defined solely by lithography with no restrictions in physical layout. Further, the entire process is identical to that of solitary VCSELs, facilitating cost-effective manufacturing.

摘要

我们提出了一种新颖的垂直腔面发射激光器(VCSEL)多波长阵列设计,该设计使用高对比度光栅(HCG)作为顶部反射镜。通过仅修改高对比度光栅的周期和占空比,预计可实现超过100 nm的一系列VCSEL腔波长,而外延层厚度保持不变。采用这种新颖设计制造的VCSEL阵列能够轻松适应整个掺铒光纤放大器带宽,其发射波长仅由光刻定义,对物理布局没有限制。此外,整个过程与单个VCSEL的过程相同,便于实现具有成本效益的制造。

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