Hsu Shih-Hsin, Chang Yia-Chung, Chen Yi-Chun, Wei Pei-Kuen, Kim Y D
Research Center for Applied Sciences, Academia Sinica, Sec. 2, Taipei, Taiwan.
Opt Express. 2010 Jan 18;18(2):1310-5. doi: 10.1364/OE.18.001310.
Spectroscopic ellipsometry (SE) measurements coupled with efficient theoretical modeling and scanning electron microscopy analysis are used in the metrology of randomly-distributed gold nanoparticles on a multilayer film. Measurements were conducted in the ultraviolet to near infrared region at several angles of incidence. To understand the size, shape, and distribution of nanoparticles, a finite-element Green's function approach considering the scattering from multiple nanoparticles was employed to calculate the ellipsometry parameters. Our calculations are in fair agreement with the ellipsometry measurements when suitable size, shape, and distribution pattern of nanoparticles are found. This demonstrates that SE could be a useful tool to the metrology of arbitrarily-distributed nanoparticles on a multilayer film.
椭圆偏振光谱法（SE）测量结合高效的理论建模和扫描电子显微镜分析，用于多层膜上随机分布的金纳米颗粒的计量。在几个入射角下，于紫外到近红外区域进行了测量。为了解纳米颗粒的尺寸、形状和分布，采用考虑多个纳米颗粒散射的有限元格林函数方法来计算椭圆偏振光谱参数。当找到合适的纳米颗粒尺寸、形状和分布模式时，我们的计算结果与椭圆偏振光谱测量结果相当吻合。这表明SE可能是多层膜上任意分布纳米颗粒计量的有用工具。
