Shah Hosseini Ehsan, Yegnanarayanan Siva, Atabaki Amir Hossein, Soltani Mohammad, Adibi Ali
School of Electrical and Computer Engineering, Georgia Institute of Technology, 777 Atlantic Drive NW, Atlanta, GA 30332-0250, USA.
Opt Express. 2010 Feb 1;18(3):2127-36. doi: 10.1364/OE.18.002127.
High quality (Q approximately 6 x 10(5)) microdisk resonators are demonstrated in a Si(3)N(4) on SiO(2) platform at 652-660 nm with integrated in-plane wrap-around coupling waveguides to enable critical coupling to specific microdisk radial modes. Selective coupling to the first three radial modes with >20dB suppression of the other radial modes is achieved by controlling the wrap-around waveguide width. Advantages of such pulley-coupled microdisk resonators include single mode operation, ease of fabrication due to larger waveguide-resonator gaps, the possibility of resist reflow during the lithography phase to improve microdisk etched surface quality, and the ability to realize highly over-coupled microdisks suitable for low-loss delay lines and add-drop filters.
在二氧化硅上的氮化硅平台上，于652 - 660纳米波长处展示了高质量（品质因数约为6×10⁵）的微盘谐振器，其具有集成的平面环绕耦合波导，以实现与特定微盘径向模式的临界耦合。通过控制环绕波导宽度，可实现对前三个径向模式的选择性耦合，同时对其他径向模式的抑制大于20分贝。这种滑轮耦合微盘谐振器的优点包括单模工作、由于波导 - 谐振器间隙较大而易于制造、在光刻阶段进行抗蚀剂回流以改善微盘蚀刻表面质量的可能性，以及实现适用于低损耗延迟线和分插复用滤波器的高度过耦合微盘的能力。
