High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range.
作者信息
Hosseini Ehsan Shah, Yegnanarayanan Siva, Atabaki Amir Hossein, Soltani Mohammad, Adibi Ali
机构信息
School of Electrical and Computer Engineering, Georgia Institute of Technology, 777 Atlantic Drive NW, Atlanta, GA 30332-0250, USA.
出版信息
Opt Express. 2009 Aug 17;17(17):14543-51. doi: 10.1364/oe.17.014543.
PMID:19687933
Abstract
High quality factor (Q approximately 3.4 x 10(6)) microdisk resonators are demonstrated in a Si(3)N(4) on SiO(2) platform at 652-660 nm with integrated in-plane coupling waveguides. Critical coupling to several radial modes is demonstrated using a rib-like structure with a thin Si(3)N(4) layer at the air-substrate interface to improve the coupling.
摘要
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