Institute of Microelectronics, Tsinghua University, Beijng, China.
IEEE Trans Ultrason Ferroelectr Freq Control. 2010;57(2):292-8. doi: 10.1109/TUFFC.2010.1409.
Finite element simulation has been employed as a promising method in the analysis of piezoelectric active devices. It is desirable to obtain results consistent with experiments for real devices. In this paper, precise geometry models of quartz resonators were generated from direct measurements of practical devices and meshed. Realistic quartz blanks, electrodes, and mountings were included in the models. An application- specified 3-D finite element simulator was developed to perform the modal analysis of realistic crystal resonators. Using the model and simulator, real devices were simulated. Simulation results, including modal analysis and temperature properties, were shown in consistency with experimental measurements. The dependencies of device performance on practical factors were studied.
有限元模拟已被用作分析压电主动器件的一种很有前途的方法。期望获得与实际器件实验结果一致的结果。在本文中，从实际器件的直接测量生成了石英谐振器的精确几何模型，并对其进行了网格划分。模型中包含了真实的石英毛坯、电极和安装件。开发了一种特定于应用的 3-D 有限元模拟器，以对实际晶体谐振器进行模态分析。使用该模型和模拟器对真实器件进行了模拟。模拟结果，包括模态分析和温度特性，与实验测量结果一致。研究了器件性能对实际因素的依赖性。
