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硅纳米线中的电控巨型压阻效应。

Electrically controlled giant piezoresistance in silicon nanowires.

机构信息

Institute of Microelectronics, A*STAR, Singapore.

出版信息

Nano Lett. 2010 Apr 14;10(4):1248-52. doi: 10.1021/nl9037856.

Abstract

Herein we demonstrate giant piezoresistance in silicon nanowires (NWs) by the modulation of an electric field-induced with an external electrical bias. Positive bias for a p-type device (negative for an n-type) partially depleted the NWs forming a pinch-off region, which resembled a funnel through which the electrical current squeezed. This region determined the total current flowing through the NWs. In this report, we combined the electrical biasing with the application of mechanical stress, which impacts the charge carriers' concentration, to achieve an electrically controlled giant piezoresistance in nanowires. This phenomenon was used to create a stress-gated field-effect transistor, exhibiting a maximum gauge factor of 5000, 2 orders of magnitude increase over bulk value. Giant piezoresistance can be tailored to create highly sensitive mechanical sensors operating in a discrete mode such as nanoelectromechanical switches.

摘要

在此,我们通过外加偏置电场的调制来演示硅纳米线(NWs)中的巨大压阻效应。对于 p 型器件施加正偏压(对于 n 型器件施加负偏压)会部分耗尽 NWs,形成一个夹断区域,类似于一个通过该区域的电流被挤压的漏斗。该区域决定了流过 NWs 的总电流。在本报告中,我们将电偏置与机械应力的施加相结合,机械应力会影响载流子的浓度,从而在纳米线中实现电控制的巨大压阻效应。这种现象被用来创建一个应力门控场效应晶体管,其表现出的最大应变系数为 5000,比体值增加了两个数量级。巨大的压阻效应可以被定制,以创建高度灵敏的机械传感器,这些传感器以离散模式运行,例如纳米机电开关。

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