Microsystems Engineering, Kate Gleason College of Engineering, Rochester Institute of Technology, Rochester, New York 14623, USA.
Opt Lett. 2010 Mar 1;35(5):649-51. doi: 10.1364/OL.35.000649.
An efficient coupler between a dielectric waveguide and a plasmonic metal-insulator-metal (MIM) waveguide is proposed, modeled, fabricated, and characterized. Based on the platform of a silicon slot waveguide, a quasi-MIM plasmonic junction is formed via e-beam lithography and lift-off process. Coupling efficiency between the silicon slot waveguide and plasmonic waveguide up to 43% is obtained after normalizing to reference waveguides at 1550 nm. This coupling scheme can be potentially used for fast optical switching and small-footprint optical modulation.
提出、建模、制作和测试了一种介质波导和等离子金属-绝缘体-金属（MIM）波导之间的高效耦合器。基于硅槽波导平台，通过电子束光刻和剥离工艺形成准 MIM 等离子体结。在 1550nm 处对参考波导归一化后，硅槽波导和等离子体波导之间的耦合效率高达 43%。这种耦合方案可用于快速光开关和小尺寸光调制。
