Sun Haishan, Chen Antao, Szep Attila, Dalton Larry R
Applied Physics Laboratory, University of Washington, Seattle, Washington 98105, USA.
Opt Express. 2009 Dec 7;17(25):22571-7. doi: 10.1364/OE.17.022571.
A mode size converter for efficient fiber coupling to silicon slot waveguides was proposed and demonstrated. It consists of two inverted lateral tapers that extend from the two strips of the silicon slot waveguide, and an overlaid low index waveguide with expanded mode size. Parameters including taper length and taper tip width were optimized with computer simulations. Samples were fabricated with a combined electron beam and photolithography process on a silicon-on-insulator wafer. The measured coupling loss to a standard single mode optical fiber was reduced by 8 dB for TE mode and 5.2 dB for TM mode with the converter.
提出并演示了一种用于高效光纤耦合到硅槽波导的模式尺寸转换器。它由从硅槽波导的两条带延伸出的两个倒置横向锥形结构以及一个模式尺寸扩展的覆盖低折射率波导组成。通过计算机模拟对包括锥形长度和锥形尖端宽度在内的参数进行了优化。在绝缘体上硅晶圆上采用电子束和光刻相结合的工艺制作了样品。使用该转换器时，测量到与标准单模光纤的耦合损耗在TE模式下降低了8 dB，在TM模式下降低了5.2 dB。
