Moore R C, Slaymaker F H
Appl Opt. 1980 Jul 1;19(13):2196-200. doi: 10.1364/AO.19.002196.
When measuring the contours of spherical surfaces by direct phase measurement the Twyman-Green interferometer is usually chosen in preference to the Fizeau interferometer. In the Twyman-Green interferometer the phase reference is provided by moving a plane mirror in a direction normal to its surface. In the spherical-wave Fizeau interferometer the reflecting surfaces are spherical and, at the same instant at least, cannot be moved in a direction normal to the surfaces at all points over the optical aperture. It can be shown analytically, however, that for a spherical test surfaces having an N.A. less, similar0.8, the error introduced by moving the test surface axially, rather than radially, can be made <lambda/100.
通过直接相位测量来测量球面轮廓时,通常优先选择泰曼-格林干涉仪而非斐索干涉仪。在泰曼-格林干涉仪中,相位参考是通过沿垂直于其表面的方向移动平面反射镜来提供的。在球面波斐索干涉仪中,反射面是球面,并且至少在同一时刻,在整个光学孔径上的所有点都不能沿垂直于表面的方向移动。然而,可以通过分析表明,对于数值孔径小于0.8的球面测试表面,轴向而非径向移动测试表面所引入的误差可以小于λ/100。