Gatzweiler A, Glatzel H
Appl Opt. 1995 Nov 1;34(31):7207-12. doi: 10.1364/AO.34.007207.
Subaperture interferometric measurements of highly curved surfaces with a shape close to a cylinder have been performed in a normal-incident setup that consists of a Fizeau interferometer in combination with a plano-concave cylindrical lens. Since the field of view in the circumferential direction is limited by spherical aberration, the optical components were designed to minimize spherical aberration. For reference measurements a second plano-convex cylindrical lens was used. The subaperture setup leads to three-dimensional surface maps of the objects under test. To eliminate the influence of residual geometric aberrations, rectangular polynomials have been fitted and subtracted from the raw data. For deformations with spatial wavelengths below 30 mm, a rms amplitude resolution of 1 nm and a rms amplitude accuracy of 3 nm were achieved. Measurements on Wolter-type-I mirror shells are discussed in detail.
在由菲索干涉仪与平凹柱面透镜组合而成的正入射装置中，对形状接近圆柱体的高曲面进行了子孔径干涉测量。由于圆周方向的视场受球差限制，因此对光学元件进行了设计，以尽量减小球差。在参考测量中使用了第二个平凸柱面透镜。子孔径设置可得到被测物体的三维表面图。为消除残余几何像差的影响，已对原始数据进行了矩形多项式拟合并减去。对于空间波长低于30毫米的变形，实现了1纳米的均方根幅度分辨率和3纳米的均方根幅度精度。详细讨论了对沃尔特I型镜壳的测量。
