Hjortsberg A
Appl Opt. 1981 Apr 1;20(7):1254-63. doi: 10.1364/AO.20.001254.
A new accurate technique for determining the optical constants of thin absorbing films is presented. The configuration used includes a conventional spectrophotometer and a transparent substrate, half of which is covered with an opaque highly reflecting metal layer prior to the deposition of the film to be studied. The normal incidence transmission T of the thin film on the transparent substrate is then combined with a measurement of the near normal reflection R(m) of the same film on the metal covered part of the substrate. The combination (T,R(m)) yields an accurate and experimentally simple technique for determining the optical constants of thin films. A detailed evaluation of the accuracy of the extracted optical constants n and k of the thin film is obtained from numerical computations using realistic assumptions of various experimental uncertainties. Comparison with conventional techniques shows a greatly improved accuracy of the new technique.
提出了一种用于确定吸收性薄膜光学常数的新的精确技术。所使用的配置包括一台传统分光光度计和一个透明基板，在沉积待研究薄膜之前，该基板的一半覆盖有不透明的高反射金属层。然后将透明基板上薄膜的垂直入射透射率T与同一薄膜在基板金属覆盖部分上的近垂直反射率R(m)的测量值相结合。组合(T, R(m))产生了一种用于确定薄膜光学常数的精确且实验简单的技术。通过使用各种实验不确定性的实际假设进行数值计算，对提取的薄膜光学常数n和k的精度进行了详细评估。与传统技术的比较表明新技术的精度有了极大提高。
