Ikeda Taro, Takahashi Kazunori, Kanamori Yoshiaki, Hane Kazuhiro
Department of Nanomechanics, Tohoku University, Sendai 980-8579, Japan.
Opt Express. 2010 Mar 29;18(7):7031-7. doi: 10.1364/OE.18.007031.
Phase shifter is an important part of optical waveguide circuits as used in interferometer. However, it is not always easy to generate a large phase shift in a small region. Here, a variable phase-shifter operating as delay-line of silicon waveguide was designed and fabricated by silicon micromachining. The proposed phase-shifter consists of a freestanding submicron-wide silicon waveguide with two waveguide couplers and an ultrasmall silicon comb-drive actuator. The position of the freestanding waveguide is moved by the actuator to vary the total optical path. Phase-shift was measured in a Mach-Zehnder interferometer to be 3.0pi at the displacement of 1.0 mum at the voltage of 31 V. The dimension of the fabricated device is 50microm wide and 85microm long.
移相器是干涉仪中光波导电路的重要组成部分。然而，在小区域内产生大的相移并非总是易事。在此，通过硅微加工设计并制造了一种用作硅波导延迟线的可变移相器。所提出的移相器由具有两个波导耦合器的独立亚微米宽硅波导和一个超小硅梳状驱动致动器组成。独立波导的位置由致动器移动以改变总光程。在马赫-曾德尔干涉仪中测量到，在31 V电压下位移为1.0μm时相移为3.0π。所制造器件的尺寸为宽50μm、长85μm。
