Du Han, Chau Fook Siong, Zhou Guangya
Department of Mechanical Engineering, National University of Singapore, 9 Engineering Drive 1, Singapore 117575.
Micromachines (Basel). 2016 Apr 16;7(4):69. doi: 10.3390/mi7040069.
This article reviews mechanically-tunable photonic devices with on-chip integrated MEMS/NEMS actuators. With related reports mostly published within the last decade, this review focuses on the tuning mechanisms of various passive silicon photonic devices, including tunable waveguides, couplers, ring/disk resonators, and photonic crystal cavities, and their results are selectively elaborated upon and compared. Applications of the mechanisms are also discussed. Future development of mechanically-tunable photonics is considered and one possible approach is based on plasmonics, which can confine light energy in the nano-scale space. Optomechanics is another innovation, derived from the strong coupling of optical and mechanical degrees of freedom. State-of-the-art studies of mechanically-tunable plasmonics and on-chip optomechanics are also selectively reviewed.
本文综述了具有片上集成微机电系统（MEMS）/纳机电系统（NEMS）致动器的机械可调谐光子器件。相关报道大多发表于过去十年内，本综述聚焦于各种无源硅光子器件的调谐机制，包括可调谐波导、耦合器、环形/盘形谐振器和光子晶体腔，并对其结果进行了选择性阐述和比较。还讨论了这些机制的应用。探讨了机械可调谐光子学的未来发展，一种可能的方法是基于等离子体激元学，它可以将光能限制在纳米尺度空间内。光力学是另一项创新，源于光学和机械自由度的强耦合。还对机械可调谐等离子体激元学和片上光力学的前沿研究进行了选择性综述。
