Disseldorp E C M, Tabak F C, Katan A J, Hesselberth M B S, Oosterkamp T H, Frenken J W M, van Spengen W M
Leiden University, Niels Bohrweg 2, 2333 CA Leiden, The Netherlands.
Rev Sci Instrum. 2010 Apr;81(4):043702. doi: 10.1063/1.3361215.
The high speed performance of a scanning probe microscope (SPM) is improved if a microelectromechanical systems (MEMS) device is employed for the out-of-plane scanning motion. We have carried out experiments with MEMS high-speed z-scanners (189 kHz fundamental resonance frequency) in both atomic force microscope and scanning tunneling microscope modes. The experiments show that with the current MEMS z-scanner, lateral tip speeds of 5 mm/s can be achieved with full feedback on surfaces with significant roughness. The improvement in scan speed, obtained with MEMS scanners, increases the possibilities for SPM observations of dynamic processes. Even higher speed MEMS scanners with fundamental resonance frequencies in excess of a megahertz are currently under development.
如果将微机电系统(MEMS)器件用于平面外扫描运动,扫描探针显微镜(SPM)的高速性能将得到改善。我们已经在原子力显微镜和扫描隧道显微镜模式下使用MEMS高速z扫描器(基频共振频率为189kHz)进行了实验。实验表明,使用当前的MEMS z扫描器,在具有明显粗糙度的表面上进行全反馈时,可以实现5mm/s的横向针尖速度。使用MEMS扫描器获得的扫描速度提升,增加了SPM对动态过程进行观测的可能性。目前正在开发基频共振频率超过1兆赫兹的更高速度的MEMS扫描器。