基于有限元分析的快速扫描探针显微镜的刚性设计

Rigid design of fast scanning probe microscopes using finite element analysis.

作者信息

Kindt Johannes H, Fantner Georg E, Cutroni Jackie A, Hansma Paul K

机构信息

Department of Physics, University of California, Santa Barbara, CA 93106, USA.

出版信息

Ultramicroscopy. 2004 Aug;100(3-4):259-65. doi: 10.1016/j.ultramic.2003.11.009.

DOI:10.1016/j.ultramic.2003.11.009

PMID:15231318

Abstract

To improve the performance of atomic force microscopes regarding speed and noise sensitivity, it is important to consider the mechanical rigidity of the actuator (scanner), and the overall mechanical structure. Using finite element analysis in the design process, it was possible to increase the first resonance frequency from 950 Hz for the whole system to 23.4 kHz for the whole system. This constitutes a factor of approximately 25 in resonance frequency and a factor of 625 in stiffness and, hence, noise immunity.

摘要

为了提高原子力显微镜在速度和噪声敏感度方面的性能，考虑致动器（扫描器）的机械刚度以及整体机械结构非常重要。在设计过程中使用有限元分析，能够将整个系统的第一共振频率从950赫兹提高到23.4千赫兹。这意味着共振频率提高了约25倍，刚度提高了625倍，从而提高了抗噪声能力。